Semiconductor Wafer Probing & Dicing
MINIRAIL 7/9 mm guides for probe card Z-axis and wafer dicing saw X-Y stages. Sub-micron geometric accuracy with low-particle stainless steel construction compatible with ISO Class 1 cleanrooms.
About Schneeberger
Schneeberger AG, founded in 1923 and headquartered in Roggwil, Switzerland, is the undisputed specialist in miniature linear guides and ultra-precision linear measurement technology. With nearly a century of Swiss precision engineering heritage, Schneeberger produces the industry's smallest profiled linear guides — starting at just 7 mm rail width — alongside integrated nanometer-resolution measurement systems.
Where most linear guide manufacturers consider 15 mm rail width to be 'miniature,' Schneeberger's MINIRAIL family goes down to 7 mm and 9 mm sizes — the holy grail for semiconductor wafer probing, medical optical alignment, and precision metrology instruments where every cubic millimeter of space matters. Their MONORAIL AMS (Absolute Measurement System) integrates a magnetic scale directly into the guide rail for sub-micron, backlash-free position feedback.
Core Product Lines
MINIRAIL MN 7 / 9 / 12 / 15
Miniature Linear Guides
Ultra-compact two-row ball guides starting from 7 mm rail width. The smallest profiled linear guide in the world. All stainless steel construction with ultra-smooth motion.
Applications: Semiconductor probing, fiber optic alignment, medical micro-positioning
MONORAIL BM / MR 4S
Profiled Linear Guides
Four-row ball circulation guides with high rigidity and accuracy. Available in sizes 15-65 with integrated lubrication and sealing options.
Applications: High-precision machine tools, measurement machines, automation
MONORAIL AMS
Integrated Absolute Measurement System
Magnetic measurement scale integrated into MONORAIL guide rail. 1 µm resolution, 5 µm accuracy, no referencing required on startup. IP67 rated.
Applications: Metrology axes, semiconductor stages, medical imaging gantries
MINISLIDE MSQ / MSC
Miniature Ball Screw Modules
Compact linear modules combining MINIRAIL guideway and miniature ball screw in a space-optimized aluminum housing. Stroke lengths up to 300 mm.
Applications: Optical benches, test fixtures, lab automation, pick-and-place
Technical Parameters
| Parameter | Value |
|---|---|
| Rail Width Range | 7 - 65 mm |
| MINIRAIL Running Parallelism | < 0.5 µm |
| AMS Resolution / Accuracy | 1 µm / 5 µm |
| Geometric Accuracy (Best) | C0-class |
| Operating Temperature | -40°C - +80°C |
| Friction Coefficient | 0.001 - 0.003 |
Key Applications & Operating Conditions
Ophthalmic & Surgical Microscopes
MONORAIL guides with AMS integrated measurement for surgical microscope positioning arms. Absolute position feedback eliminates homing on startup — critical in emergency surgical scenarios.
Fiber Optic Alignment Engines
MINISLIDE modules with MINIRAIL 9 mm guides for silicon photonics alignment. Motion resolution below 50 nm with piezo-actuated fine positioning for waveguide coupling.
Coordinate Measuring & Metrology
MONORAIL BM series with AMS scale for CMM and gear measurement machine axes. No separate linear encoder required — the guide rail is the measurement reference, eliminating Abbe offset errors.
Cross-Brand Compatibility Reference
Schneeberger MINIRAIL guides in 7-12 mm sizes have no direct equivalent from THK, NSK, or HIWIN — they occupy a unique niche in sub-15 mm miniature profiled guides. For MONORAIL BM 15-45 mm sizes, THK SHS/SSR and HIWIN HG series offer comparable performance envelopes. The AMS integrated measurement system is a Schneeberger exclusive — no other manufacturer integrates magnetic absolute scales directly into the guide rail profile.
Common Faults & Maintenance
- MINIRAIL motion roughness in cleanroom service: MINIRAIL guides are factory-lubricated with ultra-clean perfluoropolyether (PFPE) grease for cleanroom use. If roughness develops, do not use standard hydrocarbon greases. Clean with PFPE-based solvent and re-lubricate only with the Schneeberger-specified PFPE grease (available through Xianhuihui Technology).
- AMS position signal dropout or noise: Check the AMS read head gap (0.4 mm nominal). Magnetic scale contamination (ferrous particles) will cause signal degradation — clean the scale with compressed dry nitrogen. Verify the read head cable is properly shielded and grounded per the AMS installation manual.
- MONORAIL carriage preload loss after thermal cycling: Check the preload class specification against actual operating temperature extremes. For applications cycling between -20°C and +80°C, specify the P2 (medium preload) option to maintain adequate preload across the thermal range. Replace carriages if preload has dropped below 0.03 · C.
Frequently Asked Questions
Q1: What is the smallest Schneeberger linear guide available?
The MINIRAIL MN 7 has a rail width of just 7 mm, with block dimensions of 17 mm (width) × 6 mm (height). It supports dynamic loads up to 190 N and is available in accuracy classes N (standard) through UP (ultra-precision). This is the world's smallest standardized profiled linear guide.
Q2: How does the AMS integrated measurement system work?
The MONORAIL AMS embeds a magnetic scale directly into the guide rail profile, read by a non-contact magnetic sensor head mounted on the carriage. It provides 1 µm resolution absolute position feedback without requiring a reference mark or homing sequence on startup. The system is IP67-rated and immune to oil mist and coolant contamination.
Q3: Are Schneeberger MINIRAIL guides compatible with vacuum environments?
Yes. MINIRAIL guides are available with vacuum-compatible PFPE lubricants rated for 10⁻⁶ Pa. The all-stainless-steel construction (1.4034 / 1.4125) eliminates outgassing concerns. Special vacuum bake-out procedures are available for UHV applications.
Q4: What is the typical delivery time for custom-length MONORAIL AMS rails?
Standard catalog lengths (up to 4,000 mm) in accuracy class G1 typically ship in 3-4 weeks. Custom cut lengths with AMS scale integration require 6-8 weeks due to the precision scale bonding and calibration process. Contact thk@591888888.com for current availability.